硅窗口片

硅窗口片

Note for Silicon Window:
(1). Custom-made Silicon windows at any size are available.
Besides round, shape of quadrate, triangular, or other polygonal are available.
(2). Thickness from 1.0mm to 80.0 mm is available upon request.
(3). Better bevel is available upon request.
(4). Si Windows with Anti-Reflective(AR), High-Reflective(HR), Partial-Reflective(PR)coating are available.

Attribute

Specification

Typical Diameter (Φmm)

8.0, 10.0, 12.7, 15.0, 20.0, 25.4, 30.0

Typical Thickness (mm)

1.0 ~ 20.0

Diameter Tolerance (mm)

+0.0/-0.2 (General), +0.0/-0.1 (High Precision)

Thickness Tolerance (mm)

±0.2 (General), ±0.05 (High Precision)

Clear Aperture

>80% (Small Size), >90% (Large Size)

Parallelism

3 min. (General), 10 sec. (High Precision)

Surface Quality

60/40 (General), 10/5 (High Precision)

Roughness Ra (nm)

<1 nm (roughness test report)

Flatness (per 25mm@633nm)

λ(General), λ/4 (High Precision)

Bevel (face width x 45。)

<0.25mm

Coating

Uncoated, AR, HR, PR, Coating, etc.

 

 

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